1.

Conference Proceedings
Conference Proceedings
1. Silicon epitaxy and oxidation
Meindl D. J. ; Dutton W. R. ; Saraswat C. K. ; Plummer D. J. ; Kamins I. T. ; Deal E. B.
Pub. info.: Process and device modeling for integrated circuit design : [proceedings of the NATO Advanced Study Institute on Process and device modeling for integrated circuit design, Louvain-la-Neuve, Belgium, July 19-29, 1977].  pp.57-113,  1977.  Leyden.  Noordhoff International Publishing
Title of ser.: NATO ASI series. Series E, Applied sciences
Ser. no.: 21
2.

Conference Proceedings
Conference Proceedings
2. Rapid Thermal Multiprocessing for a programmable factory for manufacturing of ICs
Saraswat C. K.
Pub. info.: Advances in rapid thermal and integrated processing.  pp.375-413,  1996.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO ASI series. Series E, Applied sciences
Ser. no.: 318