Sano, H. ; Karasuyama, H. ; Zheng, G.B. ; Uchiyama, Y.
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Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.930-933, 2006. Uetikon-Zuerich. Trans Tech Publications
Eco-materials processing & design VII : proceedings of the Conference of the 7th International Symposium on Eco-materials Processing & Design, January 8-11 2006, Chengdu, China. pp.402-405, 2006. Uetikon-Zuerich. Trans Tech Publications
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Ueno, K. ; Mori, Y.
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Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA. pp.592107-592107, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Higashi, Y. ; Takaie, Y. ; Endo, K. ; Kume, T. ; Enami, K. ; Yamauchi, K. ; Yamamura, K. ; Sano, H. ; Uchikoshi, J. ; Ueno, K. ; Mori, Y.
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Advances in X-ray/EUV optics, components, and applications : 14-16 August 2006, San Diego, California, USA. pp.63170B-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Yamamoto, A. ; Sano, H. ; Zheng, G. B. ; Uchiyama, Y.
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Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea. pp.493-496, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Photomask and Next-Generation Lithography Mask Technology X. pp.951-957, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering