Applications of X rays generated from lasers and other bright sources II : 30-31 July 2001, San Diego, USA. pp.106-113, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Soft X-ray lasers and applications III : 19-20 July 1999, Denver, Colorado. pp.37-44, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Soft X-ray and EUV imaging systems : 3-4 August 2000, San Diego, USA. pp.113-120, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Soft X-ray lasers and applications II : 28-29 July, 1997, San Diego, California. pp.193-202, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Soft X-ray lasers and applications II : 28-29 July, 1997, San Diego, California. pp.80-85, 1997. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.535-542, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering