1.

Conference Proceedings
Conference Proceedings
1. An Expanding Thermal Plasma for Deposition of a-Si:H
Severens, R. J. ; Brussaard, G. J. H. ; Verhoeven, H. J. M. ; Sanden, M. C. M. van de ; Schram, D. C.
Pub. info.: Amorphous silicon technology, 1995 : Symposium held April 18-21, 1995, San Francisco, California, U.S.A..  pp.33-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 377
2.

Conference Proceedings
Conference Proceedings
2. On the Effect of Substrate Temperature on a-Si:H Deposition Using an Expanding Thermal Plasma
Severens, R. J. ; Sanden, M. C. M. van de ; Verhoeven, H. J. M. ; Bastiaanssen, J. ; Schram, D. C.
Pub. info.: Amorphous silicon technology, 1996 : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.341-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 420
3.

Conference Proceedings
Conference Proceedings
3. Hard Amorphous Hydrogenated Carbon Films Deposited from an Expanding Thermal Plasma
Gielen, J. W. A. M. ; Sanden, M. C. M. van de ; Kessels, W. M. M. ; Schram, D. C.
Pub. info.: Thin films, stresses and mechanical properties VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.287-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 436
4.

Conference Proceedings
Conference Proceedings
4. Hydrogen in a-Si:H Deposited by an Expanding Thermal Plasma: A Temperature, Growth Rate and Isotope Study
Kessels, W. M. M. ; Sanden, M. C. M. van de ; Severens, R. J. ; Ijzendoorn, L. J. van ; Schram, D. C.
Pub. info.: Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A..  pp.529-,  1999.  Warrendale.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 507
5.

Conference Proceedings
Conference Proceedings
5. On the Role of Surface Diffusion and Its Relation to the Hydrogen Incorporation During Hydrogenated Amorphous Silicon Growth
Smets, A. H. M. ; Kessels, W. M. M. ; Sanden, M. C. M. van de
Pub. info.: Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.461-466,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 762
6.

Conference Proceedings
Conference Proceedings
6. Material Structure of Microcrystalline Silicon Deposited With an Expanding Thermal Plasma
Smit, C. ; Williamson, D. L. ; Sanden, M. C. M. van de ; Swaaij, R. A. C. M. M. van
Pub. info.: Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.527-532,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 762
7.

Conference Proceedings
Conference Proceedings
7. The a-Si:H Growth Mechanism: Temperature Study of the SiH3 Surface Reactivity and the Surface Silicon Hydride Composition During Film Growth
Kessels, W. M. M. ; Barrell, Y. ; Oever, P. J. van den ; Hoefnagels, J. P. M. ; Sanden, M. C. M. van de
Pub. info.: Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.431-436,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 762
8.

Conference Proceedings
Conference Proceedings
8. Simulations of Buffer Layers in a-Si:H Thin Film Solar Cells Deposited With an Expanding Thermal Plasma
Petit, A. M. H. N. ; Zeman, M. ; Swaaij, R. A. C. M. M. van ; Sanden, M. C. M. van de
Pub. info.: Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.369-374,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 762
9.

Conference Proceedings
Conference Proceedings
9. High-Rate (＞ 1nm/s) and Low-Temperature (＜ 400℃) Deposition of Silicon Nitride Using an N2/SiH4 and NH3/SiH4 Expanding Thermal Plasma
Hong, J. ; Kessels, W. M. M. ; Sanden, M. C. M. van de
Pub. info.: Amorphous and nanocrystalline silicon-based films - 2003 : symposium held April 22-25, 2003, San Francisco, California, U.S.A..  pp.169-174,  2003.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 762
10.

Conference Proceedings
Conference Proceedings
10. Expanding Thermal Plasma for Low-k Dielectrics Deposition
Creatore, M. ; Barrell, Y. ; Kessels, W. M. M. ; Sanden, M. C. M. van de
Pub. info.: Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A..  pp.339-344,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 766