1.

Conference Proceedings
Conference Proceedings
1. Initial Evaluation of CFD Model for Isothermal CVI
Boss, D.E. ; Sambasivan, S. ; Torok, D. ; Mereu, S.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.564-570,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
2.

Conference Proceedings
Conference Proceedings
2. Surfaces of Semi-Fluorinated Block Copolymers Studied Using NEXAFS
Genzer, J. ; Sivaniah, E. ; Kramer, E. J. ; Wang, J. ; Korner, H. ; Xiang, M-L. ; Yang, S. ; Ober, C. K. ; Char, K. ; Chaudhury, M. K. ; DeKoven, B. M. ; Bubeck, R. A. ; Fischer, D. A. ; Sambasivan, S.
Pub. info.: Applications of synchrotron radiation techniques to materials science IV : sympoisum held April 13-17, 1998, San Francisco, California, U.S.A..  pp.365-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 524
3.

Conference Proceedings
Conference Proceedings
3. Investigation of BARC-resist interfacial interactions
Devadoss, C. ; Wang, Y. ; Puligadda, R. ; Lenhart, J.L. ; Jablonski, E.L. ; Fischer, D.A. ; Sambasivan, S. ; Lin, E.K. ; Wu, W.-L.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.912-922,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
4.

Conference Proceedings
Conference Proceedings
4. Surface and bulk chemistry of chemically amplified photoresists: segregation in thin films and environmental stability issues
Jablonski, E.L. ; Prabhu, V.M. ; Sambasivan, S. ; Fischer, D.A. ; Lin, E.K. ; Goldfarb, D.L. ; Angelopoulos, M. ; Ito, H.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.302-311,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
5.

Conference Proceedings
Conference Proceedings
5. X-ray absorption spectroscopy to probe interfacial issues in photolithography
Lenhart, J.L. ; Fischer, D.A. ; Sambasivan, S. ; Lin, E.K. ; Jones, R.L. ; Soles, C.L. ; Wu, W. ; Goldfarb, D.L. ; Angelopoulos, M.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.343-356,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039