1.

Conference Proceedings
Conference Proceedings
1. Watt-level DUV generation by solid state laser for lithography
Ohsako,Y. ; Sakuma,J. ; Finch,A. ; Deki,K. ; Horiguchi,M. ; Yokota,T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.497-503,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. High-power narrowband DUV Laser source by frequency mixing in CLBO
Sakuma,J. ; Finch,A. ; Ohsako,Y. ; Deki,K. ; Horiguchi,M. ; Yokota,T. ; Mori,Y. ; Sasaki,T.
Pub. info.: Advanced high-power lasers : 1-5 November 1999, Osaka, Japan.  pp.516-523,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3889
3.

Conference Proceedings
Conference Proceedings
3. Midinfrared atmospheric transmittance measurements by using the second and third harmonics of tunable TEA-CO2 lasers
Harasaki,A. ; Sakuma,J. ; Itoh,T. ; Chonan,T. ; Fukuyama,Y. ; Horie,R. ; Sugii,M.
Pub. info.: Propagation and imaging through the atmosphere : 29-31 July 1997, San Diego, California.  pp.410-418,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3125
4.

Conference Proceedings
Conference Proceedings
4. Spectral measurement of ultra line-narrowed F2 laser
Wakabayashi,O. ; Sakuma,J. ; Suzuki,T. ; Kubo,H. ; Kitatochi,N. ; Suganuma,T. ; Nakaike,T. ; Kumazaki,T. ; Hotta,K. ; Mizoguchi,H. ; Nakao,K. ; Togashi,T. ; Nabekawa,Y. ; Watanabe,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1066-1073,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
5.

Conference Proceedings
Conference Proceedings
5. Long pulse duration of F2 laser for 157-nm lithography
Watanabe,H. ; Kitatochi,N. ; Kakizaki,K. ; Tada,A. ; Sakuma,J. ; Ariga,T. ; Hotta,K.
Pub. info.: Optical Microlithography XIV.  4346  pp.1074-1079,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346