1.

Conference Proceedings

Conference Proceedings
Aya, N. ; Kano, S. ; Seto, T. ; Hirasawa, M. ; Orii, T. ; Sakiyama, K. ; Shimura, H.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.228-231,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
2.

Conference Proceedings

Conference Proceedings
Sato, M. ; Sugimoto, K. ; Adachi, K. ; Takehara, D. ; Uda, K. ; Sakiyama, K.
Pub. info.: Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control.  pp.208-215,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-21
3.

Conference Proceedings

Conference Proceedings
Takenaka, N. ; Satoh, Y. ; Ishihama, A. ; Sakiyama, K.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.121-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
4.

Conference Proceedings

Conference Proceedings
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
Pub. info.: Intergration of heterogeneous thin-film materials and devices : symposium held April 23-24, 2003, San Francisco, California, U.S.A..  pp.3-8,  2003.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 768
5.

Conference Proceedings

Conference Proceedings
Maa, J. S. ; Tweet, D. J. ; Lee, J. J. ; Hsu, S. T. ; Fujii, K. ; Naka, T. ; Ueda, T. ; Baba, T. ; Awaya, N. ; Sakiyama, K.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.135-140,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
6.

Technical Paper

Technical Paper
Ide, T. ; Kosugi, H. ; Sakiyama, K. ; Hasegawa, T. ; Doi, A.
Pub. info.: 2004 SAE world congress : technical paper.  2004.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2004
7.

Conference Proceedings

Conference Proceedings
Kano, S. ; Kohno, M. ; Sakiyama, K. ; Sasaki, S. ; Shimura, H.
Pub. info.: Photon Processing in Microelectronics and Photonics II.  pp.615-622,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4977