1.

Conference Proceedings
Conference Proceedings
1. Phase defect observation using an EUV microscope [6151-46]
Hamamoto, K. ; Tanaka, Y. ; Yoshizumi, T. ; Fukushima, Y. ; Shiotani, H. ; Sakaya, N. ; Hosoya, M ; Shoki, T ; Watanabe, T ; Kinoshita, H
Pub. info.: Emerging Lithographic Technologies X.  pp.615119-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
2.

Conference Proceedings
Conference Proceedings
2. Study on exposure contrast of an EUV mask
Hosoya, M. ; Shoki, T. ; Kinoshita, T. ; Sakaya, N. ; Nagarekawa, O.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.1026-1034,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of programmed phase defects on EUV multilayer blanks
Kinoshita, T. ; Shoki, T. ; Kobayashi, H. ; Ohkubo, R. ; Usui, Y.-I. ; Hosoya, M. ; Sakaya, N. ; Nagarekawa, O.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.595-606,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256