Sakaue, H. ; Nakasako, T. ; Nakaune, K. ; Kusuki, T. ; Miki, A. ; Horiike, Y.
Pub. info.:
Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.169-180, 1993. Pittsburgh, Pa.. Materials Research Society
Sakaue, H. ; Asami, K. ; Ichihara, T. ; Ishizuka, S. ; Kawamura, K. ; Horrike, Y.
Pub. info.:
Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.195-206, 1991. Pittsburgh. Materials Research Society
Shingubara, S. ; Sukesako, H. ; Kawasaki, T. ; Inoue, K. ; Matusi, Y. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y.
Pub. info.:
Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.641-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Shingubara, S. ; Sano, A. ; Sakaue, H. ; Takahagi, T. ; Horiike, Y. ; Radzimski, Z. J. ; Posadowski, W. M.
Pub. info.:
Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.185-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Shingubara, S. ; Murakami, Y. ; Morimoto, K. ; Sakaue, H. ; Takahagi, T.
Pub. info.:
Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.. pp.133-138, 2002. Warrendale, Pa.. Materials Research Society
Shingubara, S. ; Takata, S. ; Takahashi, E. ; Konagata, S. ; Sakaue, H. ; Takahagi, T.
Pub. info.:
Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.137-, 1996. Pittsburgh. MRS - Materials Research Society
Shingubara, S. ; Kajiwara, S. ; Osaka, T. ; Sakaue, H. ; Takahagi, T.
Pub. info.:
Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A.. pp.229-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society