Yanagida, T. ; Kobayashi, Y. ; Maeda, K. ; Ito, S. ; Sakai, F. ; Torizuka, K. ; Endo, A.
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Fourth-generation X-ray sources and ultrafast X-ray detectors :4 and 6 August 2003, San Diego, California, USA. pp.149-156, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Sakai, F. ; Ito, S. ; Yanagida, T. ; Yang, J. ; Yorozu, M.
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Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA. pp.156-162, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA. pp.59180V-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
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Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.73-84, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA. pp.61-68, 2002. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ito, S. ; Nakajyo, T. ; Yanagida, T. ; Sakai, F. ; Maeda, K. ; Torizuka, K.
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XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers. pp.627-630, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
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Photomask and Next-Generation Lithography Mask Technology XII. pp.988-999, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering