1.

Conference Proceedings

Conference Proceedings
Yanagida, T. ; Kobayashi, Y. ; Maeda, K. ; Ito, S. ; Sakai, F. ; Torizuka, K. ; Endo, A.
Pub. info.: Fourth-generation X-ray sources and ultrafast X-ray detectors :4 and 6 August 2003, San Diego, California, USA.  pp.149-156,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5194
2.

Conference Proceedings

Conference Proceedings
Sakai, F. ; Ito, S. ; Yanagida, T. ; Yang, J. ; Yorozu, M.
Pub. info.: Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA.  pp.156-162,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5196
3.

Conference Proceedings

Conference Proceedings
Yanagida, T. ; Nakajyo, t. ; Ito, S. ; Sakai, F.
Pub. info.: Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA.  pp.59180V-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5918
4.

Conference Proceedings

Conference Proceedings
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
Pub. info.: Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA.  pp.73-84,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5756
5.

Conference Proceedings

Conference Proceedings
Endo, A. ; Yorozu, M. ; Yang, J. ; Sakai, F.
Pub. info.: Advances in laboratory-based X-ray sources and optics III : 8 July, 2002, Seattle, Washington, USA.  pp.61-68,  2002.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4781
6.

Conference Proceedings

Conference Proceedings
Ito, S. ; Nakajyo, T. ; Yanagida, T. ; Sakai, F. ; Maeda, K. ; Torizuka, K.
Pub. info.: XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers.  pp.627-630,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5777
7.

Conference Proceedings

Conference Proceedings
Ishikawa, H. ; Ito, S. ; Endo, A. ; Yanagida, T. ; Torizuka, K. ; Sakai, F. ; Washio, M.
Pub. info.: Laser Resonators and Beam Control VI.  pp.50-57,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4969
8.

Conference Proceedings

Conference Proceedings
Kitamura, T. ; Kubota, K. ; Hasebe, T. ; Sakai, F. ; Nakazawa, S. ; Vohra, N. ; Yamamoto, M. ; Inoue, M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.988-999,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853