1.

Conference Proceedings
Conference Proceedings
1. Extension of KrF lithography to sub-50-nm pattern formation
Nakao,S. ; Itoh,J. ; Nakae,A. ; Kanai,I. ; Saitoh,T. ; Matsubara,H. ; Tsujita,K. ; Arimoto,I. ; Wakamiya,W.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.358-365,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Design of blazed crossed gratings for beam couplers in large-core optical fibers
Kobayashi,T. ; Saitoh,T. ; Suzuki,Y. ; Tanaka,H. ; Kawai,S.
Pub. info.: Diffractive and holographic technologies for integrated photonic systems : 22-23 January 2001, San Jose, USA.  pp.157-164,  2001.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4291
3.

Conference Proceedings
Conference Proceedings
3. High Energy Si,Zn and Ga Ion Implantation into GaAs on Si
Tamura,M. ; Saitoh,T.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1881-1886,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
4.

Conference Proceedings
Conference Proceedings
4. Determination of interface state density distribution and surface recombination velocity on passivated semiconductor surfaces by photoluminescence surface state spectroscopy
Saitoh,T. ; Hasegawa,H.
Pub. info.: Passivation of metals and semiconductors : proceedings of the Seventh International Symposium on Passivity, Passivation of Metals and Semiconductors, Technical University of Clausthal, Germany, August 21-26, 1994.  pp.53-58,  1995.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 185-188
5.

Conference Proceedings
Conference Proceedings
5. Characterization of Grain Boundaries of Al-doped Sintered β-SiC by Both HRTEM and STEM
Kaneko,K. ; Saitoh,T. ; Tsurekawa,S.
Pub. info.: Intergranular and interphase boundaries in materials : iib98 : proceedings of the 9th International Conference on Intergranular and Interphase Boundaries in Materials (iib98), held in Prague, Czech Republic, July, 1998.  pp.269-272,  1999.  Zurich-Uetikon, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 294-296
6.

Conference Proceedings
Conference Proceedings
6. Characterization of modulation-doped n-AlxGa1-xAs/GaAs heterostructure using spectroscopic ellipsometry and photoreflectance
Wong,C.C. ; Mochizuki,M. ; Yaguchi,H. ; Saitoh,T. ; Xiong,Y.-M.
Pub. info.: International Symposium on Polarization Analysis and Applications to Device Technology.  pp.226-229,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2873
7.

Conference Proceedings
Conference Proceedings
7. Optical properties of ion-implanted laser-annealed Si studied by spectroscopic ellipsometry
Asai,K. ; Watanabe,K. ; Sameshima,T. ; Saitoh,T. ; Xiong,Y.-M.
Pub. info.: International Symposium on Polarization Analysis and Applications to Device Technology.  pp.258-261,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2873
8.

Conference Proceedings
Conference Proceedings
8. Characterization of Sio-doped GaAs using photoellipsometry and photoreflectance
Mochizuki,M. ; Kobayashi,K. ; Yaguchi,H. ; Saitoh,T. ; Xiong,Y.-M.
Pub. info.: International Symposium on Polarization Analysis and Applications to Device Technology.  pp.270-273,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2873
9.

Conference Proceedings
Conference Proceedings
9. Investigation of anisotropic effect on the optical properties of InxGa1-xP using spectroscopic ellipsometry
Watanabe,K. ; Saitoh,T. ; Xiong,Y.-M.
Pub. info.: International Symposium on Polarization Analysis and Applications to Device Technology.  pp.266-269,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2873
10.

Conference Proceedings
Conference Proceedings
10. Optical properties of sol-gel Ba0.7Sr0.3TiO3 thin films studied by spectroscopic ellipsometry
Suzuki,I. ; Miyazaki,M. ; Saitoh,T. ; Xiong,Y.-M.
Pub. info.: International Symposium on Polarization Analysis and Applications to Device Technology.  pp.262-265,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2873