1.

Conference Proceedings
Conference Proceedings
1. Effect of oxidising ambient on the buried oxide synthesis in low-dose SIMOX wafers
Jablonski, J ; Miyanuwa, Y ; Mchedlid:e, T R ; Saito, M ; Katayama, T ; Imai, M ; Nakashima, S
Pub. info.: Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices.  pp.47-52,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-3
2.

Conference Proceedings
Conference Proceedings
2. Study of ADI(after develop inspection) using electron beam [6152-169]
Saito, M ; Hayashi, T ; Fujihara, K ; Saito, K ; Lin, J. ; Midorikawa, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615428-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152