1.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.105-111,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
2.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Shimura, M. ; Ishizaka, Y.
Pub. info.: Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA.  pp.11-17,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5193
3.

Conference Proceedings

Conference Proceedings
Saito, A. ; Ohta, K. ; Itoh, H. ; Oka, H.
Pub. info.: Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.427-433,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-7
4.

Conference Proceedings

Conference Proceedings
Saito, A. ; Nakajima, M. ; Miyamura, Y. ; Sogo, K. ; Ishikawa, Y. ; Hirai, Y.
Pub. info.: Nanoengineering : fabrication, properties, optics, and devices III : 15-17 August, 2006, San Diego, California, USA.  pp.63270Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6327
5.

Conference Proceedings

Conference Proceedings
Saito, A. ; Yoshioka, S. ; Kinoshita, S.
Pub. info.: Optical systems degradation, contamination, and stray light: effects, measurements, and control : 2-5 August 2004, Denver, Colorado, USA.  pp.188-194,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5526
6.

Conference Proceedings

Conference Proceedings
Yamamura, K. ; Mimura, H. ; Yamauchi, K. ; Sano, Y. ; Saito, A. ; Kinoshita, T. ; Endo, K. ; Mori, Y. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.265-270,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
7.

Conference Proceedings

Conference Proceedings
Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Kanaoka, M. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T. ; Mori, Y.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.271-276,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
8.

Conference Proceedings

Conference Proceedings
Mori, Y. ; Yamauchi, K. ; Yamamura, K. ; Mimura, H. ; Sano, Y. ; Saito, A. ; Ueno, K. ; Endo, K. ; Souvorov, A. ; Yabashi, M. ; Tamasaku, K. ; Ishikawa, T.
Pub. info.: X-ray mirrors, crystals, and multilayers II : 10-11 July 2002, Seattle, Washington, USA.  pp.58-64,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4782
9.

Conference Proceedings

Conference Proceedings
Takahara, Y. ; Saito, A. ; Oka, H.
Pub. info.: Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing.  pp.269-276,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-20
10.

Technical Paper

Technical Paper
Takada, Y. ; Ueki, S. ; Saito, A.
Pub. info.: 2004 SAE world congress : technical paper.  2004.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2004