1.

Conference Proceedings
Conference Proceedings
1. Optical issues of thin organic pellicles in 45-nm and 32-nm immersion lithography [6349-20]
Lucas, K. ; Gordon, J. S. ; Conley, W. ; Saied, M. ; Warrick, S. ; Pochkowski, M. ; Smith, M. D. ; West, C. ; Kalk, F. ; Kuijten, J. P.
Pub. info.: Photomask Technology 2006.  pp.63490K-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
2.

Conference Proceedings
Conference Proceedings
2. Sensitivity of a variable threshold model toward process and modeling parameters [6349-44]
Saied, M. ; Foussadier, F. ; Trouiller, Y. ; Belledent, J. ; Lucas, K. ; Schanen, I. ; Borjon, A. ; Couderc, C. ; Gardin, C. ; LeCam, L. ; Rody, Y. ; Sundermann, F. ; Urbani, J.-C. ; Yesilada, E.
Pub. info.: Photomask Technology 2006.  pp.634919-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349