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Conference Proceedings

1. Plasma-Based Chemical Modification of Epitaxial Graphene

S.G. Walton ; S.C. Hernández ; M. Baraket ; V.D. Wheeler ; L.O. Nyakiti

Pub. info.:	Silicon carbide and related materials 2011 : selected, peer reviewed papers from the 14th International Conference on Silicon Carbide and Related Materials 2011 (ICSCRM 2011), September 11-16, 2011, Cleveland, Ohio, USA. pp.657-660, 2012. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	717-720

Conference Proceedings

2. Controlling the Incident Ion Energy at Substrate Surfaces

S.G. Walton ; R.F. Fernsler ; E.H. Lock

Pub. info.:	51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL. pp.535-539, 2008. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	51

Conference Proceedings

3. PECVD of SiOx Films with Electron Beam Generated Plasmas

D. Leonhardt ; S.G. Walton

Pub. info.:	49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.. pp.389-393, 2006. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	49

Conference Proceedings

4. Diagnostics and Processing Applications of Electron Beam-Generated Plasmas Produced in Nitrogen

S.G. Walton ; D. Leonhardt ; R.F. Fernsler

Pub. info.:	49th annual technical conference proceedings, April 22-27, 2006, Washington, D.C.. pp.404-408, 2006. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	49

Conference Proceedings

5. Characterizations of Electron Beam-Generated Plasmas

S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger ; D.D. Blackwell ; C. Muratore

Pub. info.:	46th annual technical conference proceedings, March 3-8, 2003, San Francisco, California. pp.447-451, 2003. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	46

Conference Proceedings

6. Large Area PECVD Coatings Using Linear Electron Beam Curtains

A. Yializis ; G. Goodyear ; S.G. Walton

Pub. info.:	51st annual technical conference proceedings, April 19-24, 2008, Chicagom, IL. pp.818-821, 2008. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	51

Conference Proceedings

7. Materials Processing in Electron Beam-Generated Plasmas

C. Muratore ; S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger

Pub. info.:	47th annual technical conference proceedings, April 24-29, 2004, Dallas, Texas. pp.412-417, 2004. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	47

Conference Proceedings

8. Deposition of Silicon Dioxide Films Using Electron Beam-Generated Plasmas

S.G. Walton ; D. Leonhardt

Pub. info.:	48th annual technical conference proceedings, April 23-28, 2005, Denver, Colorado. pp.433-437, 2005. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	48

Conference Proceedings

9. Ion Flux Measurements in Electron Beam-Generated Plasmas

S.G. Walton ; D. Leonhardt ; R.F. Fernsler ; R.A. Meger

Pub. info.:	45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida. pp.378-383, 2002. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	45

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Conference Proceedings

10. Plasma Processing System Based on Electron Beam Ionization

D. Leonhardt ; M.M. Balkey ; R.F. Fernsler ; R.A. Meger ; D.P. Murphy ; S.G. Walton ; D.D. Blackwell

Pub. info.:	45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida. pp.354-359, 2002. Albuquerque, NM. Society of Vacuum Coaters
Title of ser.:	Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:	45

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Author: S.G. Walton