1.

Conference Proceedings

Conference Proceedings
H.-C. Kim ; J. Cheng ; O.-H. Park ; S.-M. Park ; C. Rettner
Pub. info.: Emerging lithographic technologies XII.  2  pp.69212B-1-69212B-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
2.

Conference Proceedings

Conference Proceedings
H.-C. Kim ; J. Cheng ; O.-H. Park ; S.-M. Park ; R. Ruiz
Pub. info.: Emerging lithographic technologies XII.  2  pp.692129-1-692129-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921