1.

Conference Proceedings
Conference Proceedings
1. Encapsulating Annealing of N+ Implanted 4H-SiC by Diamond-Like-Carbon Film
S. Miyagawa ; T. Suzuki ; T. Kudo ; M. Satoh
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.583-586,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
2.

Conference Proceedings
Conference Proceedings
2. Annealing Effect on Characteristics of p+n 4H-SIC Diode Formed by Al Ion Implantation
M. Satoh ; S. Miyagawa ; T. Kudoh ; A. Egami ; K. Numajiri
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.1023-1026,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
3.

Conference Proceedings
Conference Proceedings
3. Improving Releasability of Mold Materials for IC Encapsulation Using Epoxy Compounds
S. Kitaoka ; N. Kawashima ; M. Yoshiya ; S. Miyagawa ; Y. Noguchi
Pub. info.: THERMEC 2011 : International Conference on Processing & Manufacturing of Advanced Materials : processing, fabrication, properties, applications, August 1-5, 2011, Quebec City, Canada.  pp.2529-2534,  2012.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 706-709
4.

Conference Proceedings
Conference Proceedings
4. Fabrication of pn-Junction Diode for N+ Implanted 4H-SiC(0001) Annealed by EBAS
A. Egami ; M. Shibagaki ; A. Kumagai ; K. Numajiri ; S. Miyagawa ; T. Kudo ; S. Uchiumi ; M. Satoh
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.929-932,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557