1.

Conference Proceedings
Conference Proceedings
1. Evaluation results for Selete's exposure tool: impact of the source performance
K. Tawarayama ; S. Magoshi ; H. Aoyama ; Y. Tanaka ; S. Shirai
Pub. info.: Emerging lithographic technologies XII.  2  pp.69212V-1-69212V-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
2.

Conference Proceedings
Conference Proceedings
2. Effects of aberration and flare on lithographic performance of SFET
Y. Tanaka ; H. Aoyama ; K. Tawarayama ; S. Magoshi ; S. Shirai
Pub. info.: Emerging lithographic technologies XII.  1  pp.69211D-1-69211D-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921