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Conference Proceedings

1. Application of carbon nanotube probes in a critical dimension atomic force microscope

B. C. Park ; J. Choi ; S. J. Ahn ; D. Kim ; J. Lyou ; R. Dixson ; N. G. Orji ; J. Fu ; T. V. Vorburger

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

2. Nano patterning fabrication by low energy microcolumn lithography

T. Yoshimoto ; S. H. Hwang ; K. H. Kim ; D. J. Seong ; D. W. Kim ; Y. C. Kim ; S. J. Ahn ; H. S. Kim

Pub. info.:	Optoelectronic integrated circuits IX : 22-24 January 2007, San Jose, California. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6476

Conference Proceedings

3. Effect of setpoint on CD measurement in CD- AFM: plausibility study

B. C. Park ; J. Choi ; S. J. Ahn ; M. Shin ; D. Ihm

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69222H-1-69222H-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922