S. Garcia-Blanco ; J.-S. Caron ; S. Leclair ; P. A. Topart ; H. Jerominek
Pub. info.:
MOEMS and miniaturized systems VII : 22-23 January 2008, San Jose, California, USA. pp.68870F-1-68870F-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
S. Garcia-Blanco ; P. Topart ; Y. Desroches ; J. S. Caron ; F. Williamson
Pub. info.:
Reliability, packaging, testing, and characterization of MEMS/MOEMS VII : 21-22 January 2008, San Jose, California, USA. pp.68840P-1-68840P-8, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering