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13 results

Conference Proceedings

1. Microhole drilling using reshaped pulsed Gaussian laser beams

Karnakis,D.M. ; Fieret,J. ; Rumsby,P.T. ; Gower,M.C.

Pub. info.:	Laser beam shaping, 2-3 Aug. 2001, San Diego, USA. pp.150-158, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4443

Conference Proceedings

2. Fabrication of axisymmetric ceramic microparts using pulsed laser ablation

Boehlen-Stassen,K.L. ; Rumsby,P.T. ; Cerezo,A. ; Huang,M.

Pub. info.:	Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA. pp.129-138, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4557

Conference Proceedings

3. Laser micromachining:new developments and applications

Rizvi,N.H. ; Milne,D.K. ; Rumsby,P.T. ; Gower,M.C.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA. pp.261-271, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3933

Conference Proceedings

4. Microfabrication of biofactory-on-a-chip devices using laser ablation technology

Talary,M.S. ; Burt,J.P.H. ; Rizvi,N.H. ; Rumsby,P.T. ; Pethig,R.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.572-580, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

5. Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection

Harvey,E.C. ; Rumsby,P.T.

Pub. info.:	Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas. pp.26-33, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3223

Conference Proceedings

6. Microstructuring by excimer laser

Harvey,E.C. ; Rumsby,P.T. ; Gower,M.C. ; Remnant,J.L.

Pub. info.:	Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas. pp.266-277, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2639

Conference Proceedings

7. Laser microprojection for micromechanical device fabrication

Rumsby,P.T. ; Harvey,E.C. ; Thomas,D.W.

Pub. info.:	International Conference on Experimental Mechanics: Advances and Applications, 4-6 December, 1996, Singapore. pp.684-692, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2921

Conference Proceedings

8. 193-nm imaging using a small-field high-resolution imaging resist exposure tool

Rizvi,N.H. ; Gower,M.C. ; Ashworth,D. ; Sykes,N. ; Rumsby,P.T. ; Smith,B.W. ; Goodall,F.N. ; Lawes,R.A.

Pub. info.:	Optical Microlithography IX. Part2 pp.721-731, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2726

Conference Proceedings

9. 193-nm excimer laser microstepper system (Invited Paper)

Rizvi,N.H. ; Cashmore,J.S. ; Solomon,C.M. ; Rumsby,P.T. ; Gower,M.C.

Pub. info.:	Microlithographic Techniques in IC Fabrication. pp.30-37, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3183

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Conference Proceedings

10. New developments and applications in the production of 3D microstructures by laser micromachining

Rizvi,N.H. ; Rumsby,P.T. ; Gower,M.C.

Pub. info.:	Photonic Systems and Applications in Defense and Manufacturing. pp.240-249, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3898

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