1.

Conference Proceedings
Conference Proceedings
1. DETECTION OF THIN INTERFACIAL LAYERS BY PICOSECOND ULTRASONICS
Tas, G. ; Stoner, R.J. ; Maris, H.J. ; Rubloff, G.W. ; Oehrlein, G.S. ; Halbout, J.M.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.231-236,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. PRE-OXIDATION SILICON CLEANING AND ITS RELATION TO MOS RELIABILITY AND PROCESS-INDUCED DAMAGE
Kasi, S.R. ; Rubloff, G.W. ; Cohen, S.A. ; Hsia, L.C.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.125-130,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
3.

Conference Proceedings
Conference Proceedings
3. Real-Time Sensing and Dynamic Simulation for CVD Optimization and Control
Rubloff, G.W. ; Tedder, L.L. ; Lu, G.B.
Pub. info.: Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition.  pp.163-170,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-5
4.

Conference Proceedings
Conference Proceedings
4. ALUMINA-Ti INTERFACE REACTIONS STUDIED BY AES AND UPS
Lefakis, H. ; Liehr, M. ; Rubloff, G.W. ; Ho, P.S.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.133-138,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
5.

Conference Proceedings
Conference Proceedings
5. *COMPETING INITIAL REACTIONS AT TRANSITION METAL/SILICON INTERFACES
Rubloff, G.W.
Pub. info.: Thin films : interfaces and phenomena : symposium held December 2-6, 1985, Boston, Massachusetts, USA.  pp.3-12,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 54
6.

Conference Proceedings
Conference Proceedings
6. Real-Time Equipment, Process and Wafer State Sensing of Polysi RTCVD from SiH4 Using Mass Spectrometry
Tedder, L.L. ; Rubloff, G.W.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.382-392,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2