Search records | 東京工業大学附属図書館文献データベース

Sort order

3 results

Conference Proceedings

1. Resistance of Ni nanowires fabricated by STM-CVD

Wang,X.-D. ; Rubel,S.E. ; Purbach,U. ; Lozanne,A.L.de

Pub. info.:	Micromachining and Imaging. pp.2-6, 1997. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3009

Conference Proceedings

2. Influence of topographical variations on reliable via and contact formation

Healey,J.T. ; Rubel,S.E.

Pub. info.:	Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. pp.131-145, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3507

Conference Proceedings

3. Resolving localized oxide breakthrough during poly etch of nonvolatile floating gate structures

Healey,J.T. ; Sim,V. ; Rubel,S.E.

Pub. info.:	Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV. pp.312-320, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3507