1.

Conference Proceedings
Conference Proceedings
1. ION CHANNELING AND SPECTROSCOPIC ELLIPSOMETRY EXAMINATIONS OF THIN-FILM SiO2/EPI-Si(001) STRUCTURES
Fiory, A.T. ; Roy, P. K. ; Jellison, G.E.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.131-136,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. COMPARATIVE STUDIES OF GATE OXIDES USING THERMAL, STACKED GATE, AND RAPID THERMAL OXIDATION
Chittipeddi, S. ; Roy, P. K. ; Kannan, V. C. ; Singh, R. ; Dziuba, C. M.
Pub. info.: Polysilicon thin films and interfaces.  pp.327-332,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
3.

Conference Proceedings
Conference Proceedings
3. CRYSTALLITE DIMENSIONS AND STRAIN IN POLY-Si AND Ti-SILICIDE THIN FILMS MEASURED WITH GRAZING INCIDENCE X-RAY DIFFRACTION
Leiberich, A. ; Roy, P. K.
Pub. info.: Thin films : stresses and mechanical properties III : symposium held December 2-5, 1991, Boston, Massachusetts, U.S.A..  pp.87-92,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 239
4.

Conference Proceedings
Conference Proceedings
4. Characterization of the Seed SiO2 Layer in Stacked SiO2-Ta2O5 Gate Dielectrics
Roy, P. K. ; Laughery, M. A. ; Chacon, C. M. ; Kanan, A. M. ; Daugherty, T.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.403-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
5.

Conference Proceedings
Conference Proceedings
5. A Two-Step, Lightly Nitrided Gate Oxidation process for Sub-0.5ｦﾌm CMOS Technology
Roy, P. K. ; Ma, Y. ; Flemming, M. T.
Pub. info.: Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.409-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 428
6.

Conference Proceedings
Conference Proceedings
6. Synthesis of Ultrathin Stacked Oxides Using Low Pressure Single Furnace Cluster Process
Roy, P. K. ; Brady, D. ; Chetlur, S. ; Ma, Y. ; Morse, K.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.89-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473