1.

Conference Proceedings
Conference Proceedings
1. Carbon nanotube atomic force microscopy cantilevers
Emirov, Y.N. ; Schumacher, J.D. ; Lagel, B. ; Nguyen, N. ; Ren, Z. ; Huang, Z. ; Rossie, B.B. ; Schlaf, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1389-1392,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375
2.

Conference Proceedings
Conference Proceedings
2. Making carbon nanotube probes for high aspect ratio scanning probe metrology
Emirov, Y.N. ; Beerbom, M. ; Walters, D.A. ; Ren, Z.F. ; Huang, Z.P. ; Rossie, B.B. ; Schlaf, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.493-495,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
3.

Conference Proceedings
Conference Proceedings
3. Using carbon nanotube cantilevers in scanning probe metrology
Schlaf, R. ; Emirov, Y. ; Bieber, J.A. ; Sikder, A. ; Kohlscheen, J. ; Walters, D.A. ; Islam, M.R. ; Metha, B. ; Ren, Z.F. ; Shofner, T.L. ; Rossie, B.B. ; Cresswell, M.W.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.53-57,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689