1.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Ho,B.C.P. ; Geiszler,V.C. ; Herrick,M.T. ; King,C.F. ; Carter,R.L. ; Roman,B.J. ; Litt,L.C. ; Smith,B. ; Strozewski,K.J.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part1  pp.505-512,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999
2.

Conference Proceedings

Conference Proceedings
Lucas,K.D. ; Vasquez,J.A. ; Jain,A. ; Filipiak,S.M. ; Vuong,T. ; King,C.F. ; Roman,B.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.194-204,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
3.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Allgair,J. ; Barrick,M.W. ; Fu,C. ; Green,K.G. ; Hershey,R.R. ; Litt,L.C. ; Maltabes,J.G. ; Nelson,C. ; Roman,B.J. ; Singelyn,J.
Pub. info.: Optical Microlithography X.  pp.137-145,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
4.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Lucas,K.D. ; Reich,A. ; Roman,B.J. ; Chuang,H. ; Gilbert,P.V. ; Grobman,W.D. ; Travis,E.O. ; Tsui,P. ; Vuong,T. ; West,J.P.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.204-214,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334
5.

Conference Proceedings

Conference Proceedings
Postnikov,S.V. ; Lucas,K.D. ; Roman,B.J. ; Wimmer,K.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.901-912,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
6.

Conference Proceedings

Conference Proceedings
Sturtevant,J.L. ; Allgair,J. ; Fu,C.-C. ; Green,K.G. ; Hershey,R.R. ; Kling,M.E. ; Litt,L.C. ; Lucas,K.D. ; Roman,B.J. ; Seligman,C.S. ; Schippers,M.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.220-227,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
7.

Conference Proceedings

Conference Proceedings
Garza,C.M. ; Conley,W. ; Roman,B.J. ; Schippers,M. ; Foster,J. ; Baselmans,J. ; Cummings,K.D. ; Flagello,D.G.
Pub. info.: Optical Microlithography XIV.  4346  pp.36-44,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
8.

Conference Proceedings

Conference Proceedings
Kling,M.E. ; Cave,N. ; Falch,B.J. ; Fu,C.-C. ; Green,K.G. ; Lucas,K.D. ; Roman,B.J. ; Reich,A.J. ; Sturtevant,J.L. ; Tian,R. ; Russell,D.R. ; Karklin,L. ; Wang,Y.-T.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.10-17,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679