1.

Conference Proceedings
Conference Proceedings
1. Dopants in Electroplated Copper
Andricacos, P.C. ; Parks, C. ; Cabral, C. ; Wachnik, R. ; Tsai, R. ; Maihotra, S. ; Locke, P. ; Fluegel, J. ; Horkans, J. ; Kwietniak, K. ; Uzoh, C. ; Rodbell, K.P. ; Gignac, L. ; Walton, E. ; Chung, D. ; Geffren, R.
Pub. info.: Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium.  pp.111-121,  1999.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-9
2.

Conference Proceedings
Conference Proceedings
2. Current and Potential Uses of Positron Beams to Study Porosity in Low-k Dielectric Thin Films
Rodbell, K.P. ; Petkov, M.P. ; Weber, M.H. ; Lynn, K.G. ; Volksen, W. ; Miller, R.D.
Pub. info.: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.15-19,  2001.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 363-365
3.

Conference Proceedings
Conference Proceedings
3. Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
Grill, A. ; Patel, V. ; Rodbell, K.P. ; Huang, E. ; Christiansen, S. ; Baklanov, M.R.
Pub. info.: Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.569-574,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 716
4.

Conference Proceedings
Conference Proceedings
4. Study of Positronium in Low-k Dielectric Films by Means of 2D-Angular Correlation Experiments at a High-Intensity Slow-Positron Beam
Gessmann, T. ; Petkov, M.P. ; Weber, M.H. ; Lynn, K.G. ; Rodbell, K.P. ; Asoka-Kumar, P. ; Stoeffl, W. ; Howell, R.H.
Pub. info.: Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany.  pp.585-587,  2001.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 363-365
5.

Conference Proceedings
Conference Proceedings
5. Texture Evolution in Al(Cu) Interconnect Materials
Murray, C.E. ; Rodbell, K.P.
Pub. info.: Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 672
6.

Conference Proceedings
Conference Proceedings
6. Crystallographic Texture And Phase Metrology During Damascene Copper Processing
Kozaczek, K.J. ; DeHaven, P.W. ; Rodbell, K.P. ; Malhotra, S. ; Kurtz, D.S. ; Martin, R.I. ; Moran, P.R.
Pub. info.: Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A..  pp.5-16,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 721