1.

Conference Proceedings
Conference Proceedings
1. A Photothermal Method of Simultaneous Determination of Ultra-Shallow Junction Depth and Abruptness
Salnick, Alex ; Nicolaides, Lena ; Opsal, Jon ; Jain, Amitabh ; Rogers, Duncan ; Robertson, Lance
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.469-474,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings
Conference Proceedings
2. Diffusion of Implanted Nitrogen in Silicon at High Doses
Adam, Lahir Shaik ; Robertson, Lance ; Law, Mark E. ; Jones, Kevin ; Gable, Kevin ; Hegde, Suri ; Dokumaci, Omer
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669