1.

Conference Proceedings
Conference Proceedings
1. Overlay-performance on tungsten CMP layers using the ATHENA alignment system
Rivera,G. ; Rozzoni,L. ; Castellana,E. ; Miraglia,G. ; Lam,P.L. ; Plauth,J. ; Dunbar,A. ; Phillips,M.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.428-440,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings
Conference Proceedings
2. Rapid fabrication and characterization of sine wave targets
Day,R.D. ; Armijo,E. ; Gobby,P. ; Hatch,D. ; Rivera,G. ; Salzer,L. ; Townsend,J.
Pub. info.: Optical manufacturing and testing II : 27-29 July 1997, San Diego, California.  pp.340-345,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3134