1.

Conference Proceedings

Conference Proceedings
Veen,D.T.van ; Rikkers,E. ; Krommendijk,F. ; Sikken,B. ; Krijnen,G.J.M. ; Linders,P.W.C. ; Bakher,A.F. ; Joppe,J.L. ; Diemeer,M.B.J. ; Driessen,A. ; Koonen,A.M.J. ; Smit,M.K.
Pub. info.: Applications of photonic technology 3 : closing the gap between theory, development, and application.  pp.605-610,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3491
2.

Conference Proceedings

Conference Proceedings
Schoot,J.B.van ; Seong,N. ; Geh,B. ; Burkhardt,M. ; Graupner,P. ; Reisinger,G. ; Rubingh,R. ; Suddendorf,M. ; Finders,J. ; Rikkers,E.
Pub. info.: Optical Microlithography XIV.  4346  pp.229-240,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346