1.
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Conference Proceedings
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Dammel, R.R. ; Sakamuri, R. ; Lee, S.-H. ; Rahman, M.D. ; Kudo, T. ; Romano, A.R. ; Rhodes, L.F. ; Lipian, J. ; Hacker, C. ; Barnes, D.A.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part One pp.101-109, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
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2.
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Conference Proceedings
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Hoskins, T. ; Berger, C.M. ; Ludovice, P.J. ; Henderson, C.L. ; Seger, L.D. ; Chang, C. ; Rhodes, L.F.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.1053-1063, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
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3.
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Conference Proceedings
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Houlihan, F.M. ; Romano, A.R. ; Rentkiewicz, D. ; Sakamuri, R. ; Dammel, R.R. ; Conley, W. ; Rich, G.K. ; Miller, D. ; Rhodes, L.F. ; McDaniels, J.M. ; Chang, C.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.22-32, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
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4.
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Conference Proceedings
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Ito, H. ; Hinsberg, W.D. ; Rhodes, L.F. ; Chang, C.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.70-79, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
5.
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Conference Proceedings
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Houlihan, F.M. ; Sakamuri, R. ; Romano, A.R. ; Dammel, R.R. ; Conley, W. ; Rich, G.K. ; Miller, D. ; Rhodes, L.F. ; McDaniels, J.M. ; Chang, C.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.641-649, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|
6.
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Conference Proceedings
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Hoskins, T. ; Chung, W.J. ; Ludovice, P.J. ; Henderson, C.L. ; Seger, L.D. ; Rhodes, L.F. ; Shick, R.A.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.600-611, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|