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Conference Proceedings

1. Whole wafer critical point drying of MEMS devices

Resnick,P.J. ; Clews,P.J.

Pub. info.:	Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA. pp.189-196, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4558

Conference Proceedings

2. Surface preparation for selective tungsten deposition on MEMS structures

Resnick,P.J. ; Mani,S.S.

Pub. info.:	Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA. pp.181-188, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4558