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Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems. pp.60030V-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Rybczynski, J. ; Wang, Y. ; Banerjee, D. ; Kempa, K ; Ren, F. Z.
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Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems. pp.60030Y-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering