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11 results

Conference Proceedings

1. PHYSICAL AND ELECTRICAL PROPERTIES OF IRIDIUM THIN FILMS

Elliman, R. G. ; Lawn, M. A. ; Reeves, G. K. ; Jagadish, C.

Pub. info.:	Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.. pp.569-574, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	260

Conference Proceedings

2. Reactive Ion Etching of TiN, TiAlN, CrN and TiCN Films in CF4/O2 and CHF3/O2 Plasmas

Leech, Patrick W. ; Reeves, G. K. ; Holland, A. S.

Pub. info.:	Surface engineering for manufacturing applications : symposium held November 28-December 1, 2005, Boston, Massachusetts, U.S.A.. pp.171-176, 2006. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	890

Conference Proceedings

3. Low ohmicity contacts to mono-and polycrystalline silicon (Abstract)

Harrison, H. B. ; Williams, J. S. ; Reeves, G. K.

Pub. info.:	Interfaces and contacts : symposium held November 1982 in Boston, Massachusetts, U.S.A.. pp.381-384, 1983. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	18

Conference Proceedings

4. DRY ETCHING OF INDIUM PHOSPHIDE

Bond, P. ; Sengupta, D., ; Orrman-Rossiter, Kevin G. ; Reeves, G. K. ; Paterson, P. J. K.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.1073-1078, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

5. The Stability of Aging of Pd/Zn and Pt-Based Ohmic Contacts to p-InGaAs/InP

Leech, P. W. ; Reeves, G. K. ; Ressel, P.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.441-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

6. Kelvin Test Structure Modelling of Metal-Silicide-Silicon Contacts

Reeves, G. K. ; Holland, A. S. ; Leech, P. W.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.363-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

7. Modeling the Influence of the Silicon Doping Profile on a Silicide Well Ohmic Contact

Reeves, G. K. ; Holland, A. S. ; Leech, P. W.

Pub. info.:	Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.171-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	564

Conference Proceedings

8. C, Si and Sn Implantation of CVD Diamond as a Means of Enhancing Subsequent Etch Rate

Leech, P. W. ; Perova, T. ; Moore, R. A. ; Reeves, G. K. ; Holland, A. S. ; Ridgway, M.

Pub. info.:	Surface engineering 2004 - fundamentals and applications : symposium held November 30-December 2, 2004, Boston, Massachusetts, U.S.A.. pp.215-220, 2005. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	843

Conference Proceedings

9. Shallow and Low-Resistive Ohmic Contacts to p-In0.53Ga0.47As Based on Pd/Au and Pd/Sb Metallizations

Ressel, P. ; Wang, L. C. ; Park, M. H. ; Leech, P. W. ; Reeves, G. K. ; Kuphal, E.

Pub. info.:	Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.. pp.577-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	427

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Conference Proceedings

10. Specific contact resistance measurements on multilayer interconnect structures

Harrison, H. B. ; Reeves, G. K.

Pub. info.:	Thin films and interfaces II : symposium held November 1983, in Boston, Massachusetts, U.S.A.. pp.545-550, 1984. New York. North-Holland
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	25

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