1.

Conference Proceedings
Conference Proceedings
1. Metrology of inkjet MEMS devices
McKay, R. ; Redmond, S. ; Weller, R. ; Yamamoto, K. ; Sundaram, G.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  2  pp.1194-1202,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. Immersion scatterometry for improved feature resolution and high speed acquisition of resist profiles
Redmond, S. ; Weller, R. ; Tomasco, R. ; Keese, B. ; Spaniola, N. ; Maeda, T. ; Takenouchi, K. ; Page, L. ; Danilevsky, A. ; Williams, R. ; Berger, D. ; Ward, B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XIX.  pp.237-247,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5752
3.

Conference Proceedings
Conference Proceedings
3. Low-voltage CD-SEM applications in MEMS devices
Redmond, S. ; Mckay, R. ; Mellard, M. ; Norris, C. ; Wonnacott, J. ; Mastovich, M.E.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVI.  Part One  pp.604-615,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4689