1.

Conference Proceedings
Conference Proceedings
1. EFFECT OF THE Er3+ CONCENTRATION ON THE LUMINESCENCE OF Ca1-XErXF2+X THIN FILMS EPITAXIALLY GROWN ON Si(100)
Barriere, A.S. ; Raoux, S. ; Favennec, P.N. ; L’Haridon, H. ; Moutonnet, D.
Pub. info.: Silicon-based optoelectronic materials : Symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.441-446,  1993.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 298
2.

Conference Proceedings
Conference Proceedings
2. Plasma Synthesis of Rare Earth Doped Integrated Optical Waveguides
Raoux, S. ; Anders, S. ; Yu, K. M. ; Ivanov, I. C. ; Brown, I. G.
Pub. info.: Thin films for integrated optics applications : symposium held April 17-20, 1995, San Francisco, California USA/ editors: Bruce W. Wessels, Seth R. Marder, David M. Walba.  pp.241-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 392
3.

Conference Proceedings
Conference Proceedings
3. New Developments in Metal Ion Implantation by Vacuum Arc Ion Sources and Metal Plasma Immersion
Brown, I. G. ; Anders, A. ; Anders, S. ; Dickinson, M. R. ; MacGill, R. A. ; Monteiro, O. R. ; Oks, E. M. ; Raoux, S. ; Wang, Z. ; Yushkov, G.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.467-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396
4.

Conference Proceedings
Conference Proceedings
4. A Plasma Reactor for Solid Waste Treatment on PECVD Production Systems
Raoux, S. ; Fodor, M. A. ; Taylor, W. N. ; Cheung, D. ; Fairbairn, K.
Pub. info.: Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A..  pp.101-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 447
5.

Conference Proceedings
Conference Proceedings
5. High Concentration Erbium Implantation of Epitaxially Grown CaF2/Si Structures
Raoux, S. ; Barriere, A. S. ; Lozykowski, H. J. ; Brown, I. G.
Pub. info.: Thin films for integrated optics applications : symposium held April 17-20, 1995, San Francisco, California USA/ editors: Bruce W. Wessels, Seth R. Marder, David M. Walba.  pp.247-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 392
6.

Conference Proceedings
Conference Proceedings
6. Study of Sr1-xErxF2+x luminescent thin films epitaxially grown on InP(100)
Barriere, A. S. ; Mombelli, B. ; Kim, B. Y. ; Raoux, S. ; Garcia, A.
Pub. info.: Rare earth doped semiconductors : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.319-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 301
7.

Conference Proceedings
Conference Proceedings
7. Effect of the Er3+ concentration on the luminescence of Ca1-xErxF2+x thin films epitaxially grown on Si(100)
Barriere, A. S. ; Raoux, S. ; Favennec, P. N. ; L'Haridon, H. ; Moutonnet, D.
Pub. info.: Rare earth doped semiconductors : symposium held April 13-15, 1993, San Francisco, California, U.S.A..  pp.113-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 301
8.

Conference Proceedings
Conference Proceedings
8. In Situ RF Diagnostic for PECVD Process Control
Raoux, S. ; Liu, K. S. ; Guo, X. ; Silvetti, D.
Pub. info.: In situ process diagnostics and intelligent materials processing : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A..  pp.53-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 502
9.

Conference Proceedings
Conference Proceedings
9. Liquid immersion lithography: evaluation of resist issues
Hinsberg, W. ; Wallraff, G.M. ; Larson, C.E. ; Davis, B.W. ; Deline, V. ; Raoux, S. ; Miller, D. ; Houle, F.A. ; Hoffnagle, J. ; Sanchez, M.I. ; Rettner, C. ; Sundberg, L.K. ; Medeiros, D.R. ; Dammel, R.R. ; Conley, W.E.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.21-33,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376