Rajavel, D. ; Wagner, B. K. ; Maruyama, K. ; Benz II, R. G. ; Conte, A. ; Summers, C. J.
Pub. info.:
Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.. pp.275-282, 1991. Pittsburgh. Materials Research Society
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.. pp.57-62, 1993. Pittsburgh, Pa.. Materials Research Society