1.

Conference Proceedings
Conference Proceedings
1. Evaluation of overlay performance by using air shower at the prealignment
Ghosh,A. ; Tan,Y.K. ; Rajan,D.A. ; Sun,G.P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.109-113,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
2.

Conference Proceedings
Conference Proceedings
2. W-CMP alignment using ASML's ATHENA system on an I-line stepper
Prasad,K.J. ; Rajan,D.A. ; Tan,Y.K. ; Sun,G.P. ; Morgan,S. ; Phillips,M. ; Ng,B.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XV.  pp.79-88,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344