1.

Conference Proceedings
Conference Proceedings
1. Study of Ni-Silicide Contacts to Si:C Source/Drain.
S. Mertens ; Y. Cho ; F. Nouri ; R. Schreutelkamp ; Y. Kim ; P. Verheyen ; J. Steenbergen ; C. Vrancken ; H. Bender ; O. Richard ; B. Van Daele ; W. Vandervorst ; P. Absil ; S. Kubicek ; C. Demeurisse ; Z. Tokei ; A. Lauwers ; L. Geenen
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 2: new materials, processes, and equipment.  pp.139-148,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(2)
2.

Conference Proceedings
Conference Proceedings
2. Immersion-induced defect SEM-based library for fast baseline improvement and excursion
I. Englard ; R. Stegen ; E. V. Brederode ; P. Vanoppen ; I. Minnaert-Janssen ; F. Duray ; T. der Kinderen ; G. Tanriseven ; I. Lamers ; M. B. Mantecon ; L. Levin ; E. Binyamini ; N. Raccah ; S. Dror ; E. Valfer ; O. Rotlevi ; R. Schreutelkamp ; R. Piech
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518