1.

Conference Proceedings
Conference Proceedings
1. Low-temperature processing of lead zirconate titanate thin films by 28 GHz microwave irradiation for MEMS application
Z. J. Wang ; H. Kokawa ; H. Takizawa ; M. Ichiki ; R. Maeda
Pub. info.: Smart materials IV : 11-13 December 2006, Adelaide, Australia.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6413
2.

Conference Proceedings
Conference Proceedings
2. Layered Polymer Structure for pn Junction Photovoltaic Cells Prepared by Evaporative Spray Deposition using Ultradilute Solution
R. Maeda ; M. Shakutsui ; T. Tsutsui ; K. Fujita
Pub. info.: Organic Semiconductor Materials and Devices.  pp.67-72,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(25)
3.

Conference Proceedings
Conference Proceedings
3. A Study on Formability of a Polyimide Film by Using Visco-Elasticity Measurement and Hot-Embossing Tests
S.W. Youn ; K. Suda ; M. Takahashi ; R. Maeda
Pub. info.: PRICM 6 : selected, peer reviewed papers from The sixth Pacific Rim International Conference on Advanced Materials and Processing, November 5-9, 2007, ICC Jeju, Jeju Island, Korea.  561-565  pp.1189-1192,  2007.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 561-565
4.

Conference Proceedings
Conference Proceedings
4. Room-Temperature Bonding of Oxide Wafers by Ar-beam Surface Activation
H. Takagi ; J. Utsumi ; M. Takahashi ; R. Maeda
Pub. info.: Semiconductor Wafer Bonding 10: Science, Technology, and Applications.  pp.531-537,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(8)
5.

Conference Proceedings
Conference Proceedings
5. Three-dimensional X-ray lithography using a silicon mask with inclined absorbers
H. Mekaru ; T. Takano ; K. Awazu ; M. Takahashi ; R. Maeda
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
6.

Conference Proceedings
Conference Proceedings
6. Mechanical quality factor of microcantilevers for mass sensing applications
J. Lu ; T. Ikehara ; Y. Zhang ; T. Mihara ; R. Maeda
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001Y-1-68001Y-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
7.

Conference Proceedings
Conference Proceedings
7. A novel fabrication method of needle array combined x-ray gray mask with LIGA process
H. Mekaru ; T. Takano ; K. Awazu ; M. Takahashi ; R. Maeda
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001R-1-68001R-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
8.

Conference Proceedings
Conference Proceedings
8. Measurements of silicon dry-etching rates and profiles in MEMS foundries and their application to MEMS design software
T. Takano ; T. Ikehara ; R. Maeda
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001X-1-68001X-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
9.

Conference Proceedings
Conference Proceedings
9. Fabrication of bulk heterojunction photovoltaic cells with controlled distribution of p-n components by evaporative spray deposition using ultradilute solution
M. Shakutsui ; T. Iwamoto ; R. Maeda ; T. Tsutsui ; K. Fujita
Pub. info.: Organic photovoltaics IX : 12-14 August 2008, San Diego, California, USA.  pp.705215-1-705215-6,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7052