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Conference Proceedings

1. Progress on accurate metrology of pitch, height, roughness, and width artifacts using an atomic force microscope

J. Schneir ; T.H. McWaid ; R. Dixson ; V.W. Tsai

Pub. info.:	Integrated circuit metrology, inspection, and process control IX : 20-22 February 1995, Santa Clara, California. pp.401-417, 1995. Bellingham, WA. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2439

Conference Proceedings

2. Comparison and uncertainties of standards for critical dimension atomic force microscope tip width calibration

R. Dixson ; N. G. Orji

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

3. Image simulation and surface reconstruction of undercut features in atomic force microscopy

X. Qian ; J. Villarrubia ; F. Tian ; R. Dixson

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

4. Application of carbon nanotube probes in a critical dimension atomic force microscope

B. C. Park ; J. Choi ; S. J. Ahn ; D. Kim ; J. Lyou ; R. Dixson ; N. G. Orji ; J. Fu ; T. V. Vorburger

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

5. Leveraging LER to minimize linewidth measurement uncertainty in a calibration exercise

J. Robert ; B. Banke ; R. Dixson

Pub. info.:	Metrology, inspection, and process control for microlithography XXI. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6518

Conference Proceedings

6. Re-calibration of the NIST SRM 2059 master standard using traceable atomic force microscope metrotogy

R. Dixson ; J. Potzick ; N. G. Orji

Pub. info.:	Photomask technology 2008. 2 pp.71222Q-1-71222Q-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7122

Conference Proceedings

7. International photomask linewidth comparison by NIST and PTB

J. Potzick ; R. Dixson ; R. Quintanilha ; M. Stocker ; A. Vladar

Pub. info.:	Photomask technology 2008. 2 pp.71222P-1-71222P-14, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7122

Conference Proceedings

8. Photomask applications of traceable atomic force microscope dimensional metrology at NIST

R. Dixson ; N. G. Orji ; J. Potzick ; J. Fu ; R. A. Allen

Pub. info.:	Photomask technology 2007. 2 pp.67303D-1-67303D-13, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6730

Conference Proceedings

9. Angle resolved optical metrology

R. M. Silver ; B. M. Barnes ; A. Heckert ; R. Attota ; R. Dixson

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 1 pp.69221M-1-69221M-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

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Conference Proceedings

10. Traceable calibration of AFM step height measurements for integrated circuit manufacturing

J. Robert ; B. Banke ; R. Dixson ; C. Strocchia-Rivera

Pub. info.:	Metrology, inspection, and process control for microlithography XXII. 2 pp.69223V-1-69223V-17, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6922

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Author: R. Dixson