1.

Conference Proceedings
Conference Proceedings
1. REMOTE PLASMA CLEANING AND ION-INDUCED HYDROGEN DESORPTION FROM THE SILICON (100) SURFACE AND ITS APPLICATIONS TO Si EPITAXY
Kinosky, David S. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.831-836,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. THE DEPENDENCE OF DEFECT DENSITY IN GeXSi1-X/Si HETEROSTRUCTURES GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION ON DEPOSITION PARAMETERS
Kinosky, D. ; Qian, R. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Magee, C. ; Grove, C. L.
Pub. info.: Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.445-450,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 263
3.

Conference Proceedings
Conference Proceedings
3. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF Ge Si1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.
Pub. info.: Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A..  pp.353-360,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 236
4.

Conference Proceedings
Conference Proceedings
4. HYDROGEN PASSIVATION OF Si (100) BY REMOTE HYDROGEN PLASMA TREATMENT
Hsu, T. ; Anthony, B. ; Breaux, L. ; Qian, R. ; Baner-jee, S. ; Tasch, A. ; Lin,. S. ; Marcus, H. L.
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.279-284,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190
5.

Conference Proceedings
Conference Proceedings
5. HETEROEPITAXY OF Si/Si1-xGex GROWN BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Anthony, B. ; Banerjee, S. ; Tasch, A. ; Magee, C.
Pub. info.: Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A..  pp.223-228,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 223
6.

Conference Proceedings
Conference Proceedings
6. *IN SITU LOW TEMPERATURE CLEANING AND PASSIVATION OF SILICON BY REMOTE HYDROGEN PLASMA FOR SILICON-BASED EPITAXY
Banerjee, S. ; Tasch, A. ; Hsu, T. ; Qian, R. ; Kinosky, D. ; Irby, J. ; Mahajan, A. ; Thomas, S.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.43-54,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
7.

Conference Proceedings
Conference Proceedings
7. CHARACTERIZATION OF IN SITU P-TYPE ANDN-TYPE DOPED Si AND GeXSi1-X FILMS GROWN BY LOW TEMPERATURE REMOTE PLASMA CHEMICAL VAPOR DEPOSITION
Thomas, S. ; Irby, J. ; Kinosky, D. ; Qian, R. ; Iqbal, I. ; Mahajan, A. ; Benerjee, S. ; Tasch, A ; Magee, C.
Pub. info.: Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A..  pp.223-228,  1992.  Pittsburgh, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 268
8.

Conference Proceedings
Conference Proceedings
8. GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF GexSi1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, R. ; Chung, I. ; Kinosky, D. ; Hsu, T. ; Irby, J. ; Mahajan, A. ; Thomas, S. ; Banerjee, S. ; Tasch, A. ; Rabenberg, L. ; Grove, C. ; Magee, C.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.811-818,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
9.

Conference Proceedings
Conference Proceedings
9. HYDROGEN PLASMA CLEANING OF THE Si(100) SURFACE: REMOVAL OF OXYGEN AND CARBON AND THE ETCHING OF Si
Kinosky, David ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.219-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
10.

Conference Proceedings
Conference Proceedings
10. HF/ALCOHOL PREPARATION OF WAFERS FOR THE REDUCTION OF HAZE IN LOW TEMPERATURE Si EPITAXY BY REMOTE PLASMA CHEMICAL VAPOR DEPOSITION
Kinosky, D. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A. ; Magee, C.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.79-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315