Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.328-339, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.432-439, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Physics and simulation of optoelectronic devices VII : 25-29 January 1999, San Jose, USA. pp.383-394, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part1 pp.266-277, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Physics and simulation of optoelectronic devices VII : 25-29 January 1999, San Jose, USA. pp.535-542, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France. pp.30-38, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France. pp.193-199, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France. pp.272-279, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering