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14 results

Conference Proceedings

1. Zernike coefficients:are they really enough?

Progler,C.J. ; Wong,A.K.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.40-52, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

2. Interaction of pattern orientation and lens quality on CD and overlay errors

Bukofsky,S.J. ; Progler,C.J.

Pub. info.:	Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA. Part1 pp.315-325, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4000

Conference Proceedings

3. Method to budget and optimize total device overlay

Progler,C.J. ; Bukofsky,S.J. ; Wheeler,D.C.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.193-207, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

4. Application of blazed gratings for determination of equivalent primary azimuthal aberrations

Kirk,J.P. ; Progler,C.J.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part1 pp.70-76, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

5. Simulation-enabled decision making in advanced lithographic manufacturing

Progler,C.J.

Pub. info.:	Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK. pp.68-79, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4404

Conference Proceedings

6. Pupil illumination: in-situ measurement of partial coherence

Kirk,J.P. ; Progler,C.J.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.281-288, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

7. Optical lens specifications from the user's perspective

Progler,C.J. ; Wheeler,D.C.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.256-268, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

8. Application of deep-UV resist for 0.25-ｦﾌm metal and poly processing

Krisa,W.L. ; Progler,C.J. ; Brennan,K. ; Schell,J.C.

Pub. info.:	Optical Microlithography IX. Part1 pp.125-134, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2726

Conference Proceedings

9. Characterization of linewidth variation on 248- and 193-nm exposure tools

Gabor,A.H. ; Brunner,T.A. ; Chen,J. ; Chen,N. ; Deshpande,S. ; Ferguson,R.A. ; Horak,D.V. ; Holmes,S.J. ; Liebmann,L.W. ; Mansfield,S.M. ; Molless,A.F. ; Progler,C.J. ; Rabidoux,P.A. ; Ryan,D. ; Talvi,P. ; Tsou,L. ; Vampatella,B.R. ; Wong,A.K. ; Yang,Q. ; Yu,C.

Pub. info.:	Optical Microlithography XIV. 4346 pp.259-264, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

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Conference Proceedings

10. Scattered light: the increasing problem for 193-nm exposure tools and beyond

Lai,K. ; Wu,C. ; Progler,C.J.

Pub. info.:	Optical Microlithography XIV. 4346 pp.1424-1435, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

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