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15 results

Conference Proceedings

1. Impact of the Purity of Silicon on the Evolution of Ion Beam Generated Defects: From Research to Technology*

Privitera, V.

Pub. info.:	High Purity Silicon VI : proceedings of the sixth International Symposium. pp.606-620, 2000. Bellingham, Wash.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-17

Conference Proceedings

2. The Source Of Transient Enhanced Diffusion In Sub-KeV Implanted Boron In Crystalline Silicon

Napolitani, Enrico ; Carnera, A. ; Privitera, V. ; Schroer, E. ; Marmino, G. ; Priolo, F. ; Moffatt, S.

Pub. info.:	Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B5.2-, 2001. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	610

Conference Proceedings

3. 18 Excimer laser annealing: a solution for the future technology nodes?

Privitera, V. ; La Magna, A. ; Mannino, G. ; Fortunato, G. ; Mariucci, L. ; Svensson, B. C.

Pub. info.:	Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium. pp.137-144, 2003. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2003-14

Conference Proceedings

4. Ion-Beam-Injected Point Defects in Crystalline Silicon: Migration, Interaction, and Trapping Phenomena

Priolo, F. ; Privitera, V. ; Coffa, S. ; Libertino, S.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.71-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

5. The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si

Libertino, S. ; Coffa, S. ; Privitera, V. ; Priolo, F.

Pub. info.:	Microstructure evolution during irradiation : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.83-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	439

Conference Proceedings

6. The Effect of Oxygen on the Electrical Activation and Diffusion of Ion-Implanted Boron

Larsen, K. Kyllesbech ; Stolk, P. A. ; Privitera, V. ; Berkum, J. G. M. van ; Boer, W. B. de ; Mannino, G. ; Cowern, N. E. B. ; Huizing, H. G. A.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.291-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

7. Point Defects Migration and Agglomeration in Si at Room Temperature: The Role of Surface and Impurity Content

Privitera, V. ; Coffa, S. ; Larsen, K. Kyllesbech ; Libertino, S. ; Mannino, G. ; Priolo, F.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.163-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

8. Ion-Beam Injected Point Defects in Crystalline Silicon: Migration, Interaction and Trapping Phenomena

Priolo, F. ; Privitera, V. ; Coffa, S. ; Libertino, S.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.53-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

Conference Proceedings

9. The Effect of Impurity Content and Ion Mass on the Depth Profiles of Vacancy-Type Defects in MeV-Implanted Si

Libertino, S. ; Coffa, S. ; Privitera, V. ; Priolo, F.

Pub. info.:	Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.65-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	438

10.

Conference Proceedings

10. Point-Defect Migration in Crystalline Silicon: Impurity Content, Surface and Stress Effects

Coffa, S. ; Libertino, S. ; Magna, A. La ; Privitera, V. ; Mannino, G. ; Priolo, F.

Pub. info.:	Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.93-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	532

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Author: Privitera, V.