1.

Conference Proceedings
Conference Proceedings
1. Kinetics of the C49 to C54 Phase Transformation in TiSi2 Thin Films on Deep-Sub-Micron Lines
Kittl, J. A. ; Prinslow, D. A. ; Apte, P. P. ; Pas, M. F.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.269-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
2.

Conference Proceedings
Conference Proceedings
2. Modeling of Device Characteristics as Function of Ti Salicide Rapid Thermal Processing Parameters for Deep-Sub-Micron CMOS Technologies
Kittl, J. A. ; Prinslow, D. A. ; Misium, G. ; Pas, M. F.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.175-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429