1.

Conference Proceedings
Conference Proceedings
1. Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below
Harrus,A.S. ; Kelly,J. ; Powell,R.A.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.25-27,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings
Conference Proceedings
2. Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below
Harrus,A.S. ; Kelly,J. ; Powell,R.A.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.25-27,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
3.

Conference Proceedings
Conference Proceedings
3. Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below
Harrus,A.S. ; Kelly,J. ; Powell,R.A.
Pub. info.: Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV.  pp.25-27,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3507
4.

Conference Proceedings
Conference Proceedings
4. Rapid x-ray reflectometry (XRR) metrology applied to Cu/low-k damascene process development
Johnson,W.C. ; Powell,R.A. ; Koppel,L. ; Klawuhn,E. ; Felipe,T.S de
Pub. info.: Process Control and Diagnostics.  pp.106-114,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182
5.

Conference Proceedings
Conference Proceedings
5. Characterization of copper oxidation and reduction using spectroscopic ellipsometry
Powell,R.A. ; Settles,D. ; Lane,L. ; Ygartua,C.L. ; Srivatsa,A.R. ; Hayzelden,C.
Pub. info.: Process Control and Diagnostics.  pp.97-105,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182
6.

Conference Proceedings
Conference Proceedings
6. Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below
Harrus,A.S. ; Kelly,J. ; Powell,R.A.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV.  pp.25-27,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3510
7.

Conference Proceedings
Conference Proceedings
7. Equipment challenges for a total material system change: enabling device manufacturing at 130 nm and below
Harrus,A.S. ; Kelly,J. ; Powell,R.A.
Pub. info.: Multilevel Interconnect Technology II.  pp.25-27,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3508