1.

Conference Proceedings
Conference Proceedings
1. AMORPHOUS PHASE TRANSFORMATION DURING RAPID THERMAL ANNEALING OF ION-IMPLANTED Si
Kirillov, D. ; Powell, R.A. ; Hodul, D.T.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.131-138,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. DRY ETCHING DAMAGE IN GaAs AND A10.22Ga0.78As
Kirillov, D. ; Cooper, III, C.B. ; Powell, R.A.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.163-170,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76
3.

Conference Proceedings
Conference Proceedings
3. RAPID THERMAL PROCESSING: A BIBLIOGRAPHY
Powell, R.A. ; Manion, M.L.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.441-480,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
4.

Conference Proceedings
Conference Proceedings
4. Scanned electron beam annealing of boron-implanted diodes
Yep, T.O. ; Fulks, R.T. ; Powell, R.A.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.345-352,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1