1.

Conference Proceedings
Conference Proceedings
1. IMPACT OF VARIOUS POLYSILICON DEPOSITION PROCESS ON THIN GATE-OXIDE PROPERTIES IN SUBMICRON CMOS TECHNOLOGY
Rot, P. K. ; Kook, T. ; Kannan, V. C. ; Felton, G. J. ; Powell, R. A. ; Velaga, A. N.
Pub. info.: Polysilicon thin films and interfaces.  pp.281-286,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 182
2.

Conference Proceedings
Conference Proceedings
2. DOPANT REDISTRIBUTION IN TITANIUM SILICIDE/n+ POLYSILICOM BILAYERS DURING RAPID THERMAL PROCESSING
Cooper III, C. B. ; Powell, R. A. ; Chow, R.
Pub. info.: Energy beam-solid interactions and transient thermal processing : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.739-746,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 23