1.

Conference Proceedings
Conference Proceedings
1. Applications of Ni-Based Silicides to 45 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Pawlak, Malgorzata A. ; Dal, Mark Van ; Akheyar, Amal ; Potter, Muriel De ; Kottantharayil, Anil ; Pourtois, Geoffrey ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.31-42,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
2.

Conference Proceedings
Conference Proceedings
2. Silicides for 65 nm CMOS and Beyond
Kittl, Jorge A. ; Lauwers, Anne ; Chamirian, Oxana ; Dal, Mark Van ; Akheyar, Amal ; Richard, Olivier ; Lisoni, Judit G. ; Potter, Muriel De ; Lindsay, Richard ; Maex, Karen
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.267-278,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
3.

Conference Proceedings
Conference Proceedings
3. Ni Silicide Morphology On Small Features
Chamirian, Oxana ; Lauwers, Anne ; Kittl, Jorge A. ; Dal, Mark Van ; Potter, Muriel De ; Vrancken, Christa ; Lindsay, Richard ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.147-152,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
4.

Conference Proceedings
Conference Proceedings
4. Effects of Alloying on Properties of NiSi for CMOS Applications
Dal, Mark van ; Akheyar, Amal ; Kittl, Jorge A. ; Chamirian, Oxana ; Potter, Muriel De ; Demeurisse, Caroline ; Lauwers, Anne ; Maex, Karen
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.153-158,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810